Compute etch rates for both silicon and silicon dioxide with nanometer precision in standard potassium hydroxide (KOH) solutions using the KOH Etch Rate Calculator! Etch rates for silicon are given for the three major crystal planes: (100), (110), and (111). Inputs include potassium hydroxide solution temperature and concentration, both of which can be tuned over a large range to obtain the perfect etch rate! Ideal for on-the-go precision calculations in cleanrooms and other nanofabrication facilities.